SESAME

Simulation of Electron transport Supporting Analysis of MatErials

Version 1.2

Sesame is provided without support under an open source license. See the file "license.terms" for conditions.

Sesame was developed at the former Digital Campus Based Engineering Center, Wien, Austria.

• Contents
• Authors
• Introduction
• How to Use this Manual
• Before You Run SESAME for the First Time
  • OpenVMS AXP
  • Digital Unix (OSF/1)
  • OpenVMS VAX
• Analysis Methods
  • Scanning Electron Microscope (SEM)
  • Electron Micro Probe (EMP)
  • Transmission Electron Microscope (TEM)
  • Auger Electron Spectroscope (AES)
• The Graphical User Interface (GUI)
  • The VISTA TCAD Framework
  • GUI Supported Generation of the Input Deck
  • GUI Supported Generation of the Simulation Geometry
• How to Specify SESAME Features
  • How to Describe the Electron Beam
  • How to Scan
  • How to Specify the X-ray Detector(s)
  • How to Specify the Electron Detector(s)
  • How to Describe the Composition of Your Target
  • How to Describe the Geometry of Your Target
  • How to Specify Your Output
  • How to Specify a Grid
  • How to Use the Backup Function
• How to Interprete Your Simulation Results
• Files
• Input Records
  • &INIT
  • &ETRNS
  • &EBEAM
  • &TARGET
  • &MODEL
  • &MSETUP
  • &INSTR
  • &DETECT
  • &OUTPUT
• Postprocessing
  • POSTMINI
  • VIDE
  • GNUplot
  • MUFASplot
• Physical Models
  • Elastic Scattering
    • Theory
  • Inelastic Scattering
    • Theory
      • Bethe's stopping power equation:
      • Individual stopping powers:
      • Dielectric function:
      • Inner-shell Ionization Cross-section:
  • Single Scattering Model
    • Theory
    • Implementation
    • Range of Validity - Restrictions
    • Applications
  • Hybrid Model
    • Theory
    • Implementation
    • Range of Validity - Restrictions
    • Applications
  • Direct Simulation Model Using Dielectric Functions
    • Theory
    • Implementation
    • Range of Validity - Restrictions
    • Applications
  • Simulation of X-rays
  • Simulation of Auger Electrons
• References
• About this document ...