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This record is used to describe all measurement set-up parameters
except those describing parameters of the electron column, the instrument
(equipment) and the detector itself.
CURRENT --- Electron Beam Current
This variable specifies the electron beam current in nA.

EBROT --- Electron Beam Rotation Angle
This variable specifies the azimuthal angle in degrees between the simulation
plan (x-z plane) and the direction of the electron beam. ROTATE=0.
or ROTATE=180. means that the direction of the initial electron beam
lies in the simulation plane. For further information see also Chapter
6.1, especially Figure 6.3.

EBTILT --- Electron Beam Tilt Angle
This variable specifies the tilt angle in degrees, i.e. the angle between
the initial electron beam and the sample normal. The sample normal is in the
direction of the z-axis in the coordinate system in which the target geometry
is defined. For further information see also Chapter 6.1, especially
Figure 6.2.

EDPHI --- Azimuthal Angle of Electron Detector
Position(s)
This variable specifies the polar angle(s) of the position(s) of the electron
detector(s) - up to 5 different electron detectors may be specified.
If EDPHI is 0 the detector axis is orientated in positive
x axis direction. In case of
the detector is orientated in
positive y axis direction. For further information see also Chapter
6.4, especially Figure 6.6.

EDTHET --- Polar Angle of Electron Detector
Position(s)
This variable specifies the polar angle(s) of the position(s) of the electron
detector(s) - up to 5 different electron detectors may be specified.
If EDTHET = 0 the detector axis is perpendicular to the
sample surface. For further information see also Chapter 6.4,
especially Figure 6.6.

MAGNI --- Magnification
This variable specifies the magnification if SCAN is specified
T in the &EBEAM record. The distance of two adjacent impact
locations of the electron beam is determined by the specified
magnification and the pixel distance XPCRT on the used CRT
specified in the &INSTR record.

CURRENT --- Counting Time
This variable specifies the effective counting time in seconds.

SCANANG --- Angle between X-Axis and Scan Direction
This variable specifies the angle in degrees between the x-axis and the
scanning direction if SCAN is specified T in the &EBEAM
record. The default value is zero degree which means that the scanning
direction is identical to the x-axis. For further information see also Chapter
6.2, especially Figure 6.4.

TAKOFF --- X-Ray Detector Take-off Angle(s)
This variable specifies the take-off angle(s) (polar angle(s)) of the x-ray
detector(s) in degrees - up do 5 differnet x-ray detectors may be specified.
This is the angle between the target surface (x-axis of the coordinate
system in which the target geometry is defined) and the direction to the
detector. For negative angles the detector is located underneath the sample.
For further information see also Chapter 6.3 and Figure
6.2 in Chapter 6.1.

XDEROT --- X-Ray Detector Rotation Angle(s)
This variable specifies the azimuthal angle(s) in degrees between the simulation
plan (x-z plane) and the direction(s) to the x-ray detector(s) - up to 5
different x-ray detectors may be specified. XDEROT=0.
and XDEROT=180. means that the direction to the detector
lies in the simulation plane. For further information see also Chapter
6.3 and Figure 6.3 in Chapter 6.1.

XESPOT --- Lateral Electron Impact Position
This variable specifies the lateral position of impinging electrons
if SCAN is set to F and the center position if SCAN
is set to T. For further information see also Figure 6.4
in Chapter 6.2.

XRANGE --- Lateral Scanning Area
This variable specifies the lateral scanning area. This variable has no effect
if SCAN is set to F in the &BEAM record. The center
position of this range is specified by the XESPOT variable in this
record. For further information see also Chapter 6.2, especially
Figure 6.4.

Next: &INSTR
Up: Input Records
Previous: &MODEL
Horst Wagner
Tue Mar 19 10:24:55 MET 1996