In the direct simulation model, all possible relevant scattering events are
simulated separately. This approach requires accurate models describing these
fundamental processes.
Elastic scattering is well described by the partial wave approach of Mott.
For inelastic scattering a distinction is made between ionization processes
and other inelastic processes (mainly plasmon losses, inter- and intraband
transitions). Latter inelastic scattering processes (in further referred to
as inelastic) are described by the
dielectric approach proposed by Penn ([],equation ).
The innershell ionization cross sections and associated energy losses
are calculated with the expression by Gryzinsky
([Gry65], formula A.15).