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Contents
Authors
Introduction
How to Use this Manual
Before You Run SESAME for the First Time
OpenVMS AXP
Digital Unix (OSF/1)
OpenVMS VAX
Analysis Methods
Scanning Electron Microscope (SEM)
Electron Micro Probe (EMP)
Transmission Electron Microscope (TEM)
Auger Electron Spectroscope (AES)
The Graphical User Interface (GUI)
The VISTA TCAD Framework
GUI Supported Generation of the Input Deck
GUI Supported Generation of the Simulation Geometry
How to Specify SESAME Features
How to Describe the Electron Beam
How to Scan
How to Specify the X-ray Detector(s)
How to Specify the Electron Detector(s)
How to Describe the Composition of Your Target
How to Describe the Geometry of Your Target
How to Specify Your Output
How to Specify a Grid
How to Use the Backup Function
How to Interprete Your Simulation Results
Files
Input Records
&INIT
&ETRNS
&EBEAM
&TARGET
&MODEL
&MSETUP
&INSTR
&DETECT
&OUTPUT
Postprocessing
POSTMINI
VIDE
GNUplot
MUFASplot
Physical Models
Elastic Scattering
Theory
Inelastic Scattering
Theory
Bethe's stopping power equation:
Individual stopping powers:
Dielectric function:
Inner-shell Ionization Cross-section:
Single Scattering Model
Theory
Implementation
Range of Validity - Restrictions
Applications
Hybrid Model
Theory
Implementation
Range of Validity - Restrictions
Applications
Direct Simulation Model Using Dielectric Functions
Theory
Implementation
Range of Validity - Restrictions
Applications
Simulation of X-rays
Simulation of Auger Electrons
References
About this document ...
Horst Wagner
Tue Mar 19 10:24:55 MET 1996