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The energy range of primary electrons, for which the hybrid model is
valid, is equal to the one of the single scattering model (approximately
between 1 and 50 keV). Also the appropriate overvoltage range for the
simulation of x-radiation corresponds to the single scattering model
(approximately between 1 and 30).
The main differences between the hybrid model and the single
scattering model are:
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The hybrid model calculates actual inner shell ionizations at a well
defined locations, at which the ionizations take place in the
sample. In contrast to the single scattering model, in which just the
probability of an inner shell ionization is calculated, the hybrid
model calculates the actual, discreet number of ionizations of the
investigated shell.
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The hybrid model allows the user to simulate high energy secondary
electrons. This is possible, because of the energy loss
calculation after an inner shell ionization is using random numbers to get
the new properties of the primary and secondary electron.
Therefore the energy and the direction of the primary and
the secondary electron are known. Due to the inaccuracy of the
ionization cross section, only secondary electrons, which have been
generated by inner shell ionizations, can be simulated.
Horst Wagner
Tue Mar 19 10:24:55 MET 1996