In the hybrid scattering model the elastic scattering processes are calculated with the Mott cross sections. The angular deflections are mainly caused by elastic scattering events, but additionally deflections caused by inelastic scatterings are taken into account (formula A.10).
The inelastic scattering process considers the energy loss
due to innershell ionization by applying the differential cross
section of Gryzinsky ([Gry65], formula A.15) and
calculates the energy loss due to electron--valence electron
interactions using a modified Bethe stopping power as proposed by
Reimer ([RS86], formula A.8).