The simulation of the electron trajectory is more realistic than in the single scattering model due to the improved description of the inelastic scattering. Therefore this model is more suitable for the quantitative calculation of the backscattering and transsimision behaviour of the electrons in the solid. The hybrid scattering model should be used for the simulation of high energy secondary electrons and the visualization (mapping) of inner shell ionizations.
Therefore the hybrid model is advantageous and shall be applied if one of the following output options is specified in the input deck (see Chapter 9.9):
PET, BET, TET, BEE, TEE, BEA, TEA, BEP, TEP, BEW, TEW, BED, TED, BEY, TEY