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Applications

 

The single scattering model is still a widely used model especially in the field of electron probe microanalysis ( EPMA) for calculating the depth distribution functions of characteristic x-rays (see [HM91]). Due to the used continuous slowing down approximation just about a few thousands of electrons have to be simulated to get distributions of x-ray generation and detection with a satisfying statistical behaviour. To get comparable results with the hybrid model, at least about 100 times more electrons have to be simulated.

Therefore the single scattering model is advantageous and shall be applied if one of the following output options is specified in the input deck (see Chapter 9.9):

IOD, IOV, IO2, IO3, XCY, XGD, XDD


Horst Wagner
Tue Mar 19 10:24:55 MET 1996