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&MSETUP

 

This record is used to describe all measurement set-up parameters except those describing parameters of the electron column, the instrument (equipment) and the detector itself.

CURRENT --- Electron Beam Current

This variable specifies the electron beam current in nA.

EBROT --- Electron Beam Rotation Angle

This variable specifies the azimuthal angle in degrees between the simulation plan (x-z plane) and the direction of the electron beam. ROTATE=0. or ROTATE=180. means that the direction of the initial electron beam lies in the simulation plane. For further information see also Chapter 6.1, especially Figure 6.3.

EBTILT --- Electron Beam Tilt Angle

This variable specifies the tilt angle in degrees, i.e. the angle between the initial electron beam and the sample normal. The sample normal is in the direction of the z-axis in the coordinate system in which the target geometry is defined. For further information see also Chapter 6.1, especially Figure 6.2.

EDPHI --- Azimuthal Angle of Electron Detector Position(s)

This variable specifies the polar angle(s) of the position(s) of the electron detector(s) - up to 5 different electron detectors may be specified. If EDPHI is 0 the detector axis is orientated in positive x axis direction. In case of the detector is orientated in positive y axis direction. For further information see also Chapter 6.4, especially Figure 6.6.

EDTHET --- Polar Angle of Electron Detector Position(s)

This variable specifies the polar angle(s) of the position(s) of the electron detector(s) - up to 5 different electron detectors may be specified. If EDTHET = 0 the detector axis is perpendicular to the sample surface. For further information see also Chapter 6.4, especially Figure 6.6.

MAGNI --- Magnification

This variable specifies the magnification if SCAN is specified T in the &EBEAM record. The distance of two adjacent impact locations of the electron beam is determined by the specified magnification and the pixel distance XPCRT on the used CRT specified in the &INSTR record.

CURRENT --- Counting Time

This variable specifies the effective counting time in seconds.

SCANANG --- Angle between X-Axis and Scan Direction

This variable specifies the angle in degrees between the x-axis and the scanning direction if SCAN is specified T in the &EBEAM record. The default value is zero degree which means that the scanning direction is identical to the x-axis. For further information see also Chapter 6.2, especially Figure 6.4.

TAKOFF --- X-Ray Detector Take-off Angle(s)

This variable specifies the take-off angle(s) (polar angle(s)) of the x-ray detector(s) in degrees - up do 5 differnet x-ray detectors may be specified. This is the angle between the target surface (x-axis of the coordinate system in which the target geometry is defined) and the direction to the detector. For negative angles the detector is located underneath the sample. For further information see also Chapter 6.3 and Figure 6.2 in Chapter 6.1.

XDEROT --- X-Ray Detector Rotation Angle(s)

This variable specifies the azimuthal angle(s) in degrees between the simulation plan (x-z plane) and the direction(s) to the x-ray detector(s) - up to 5 different x-ray detectors may be specified. XDEROT=0. and XDEROT=180. means that the direction to the detector lies in the simulation plane. For further information see also Chapter 6.3 and Figure 6.3 in Chapter 6.1.

XESPOT --- Lateral Electron Impact Position

This variable specifies the lateral position of impinging electrons if SCAN is set to F and the center position if SCAN is set to T. For further information see also Figure 6.4 in Chapter 6.2.

XRANGE --- Lateral Scanning Area

This variable specifies the lateral scanning area. This variable has no effect if SCAN is set to F in the &BEAM record. The center position of this range is specified by the XESPOT variable in this record. For further information see also Chapter 6.2, especially Figure 6.4.



next up previous contents
Next: &INSTR Up: Input Records Previous: &MODEL



Horst Wagner
Tue Mar 19 10:24:55 MET 1996