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This record is used to describe the electron-beam-specific parameters.
DIVERG --- Beam Divergence
This variable specifies the beam divergence in degrees. The initial electron
direction will be distributed homogeneously within a cone of aperture
2*DIVERG around the beam direction.

ESTD --- Standard Deviation of Electron Energy
This variable specifies the width of the distribution of initial electron
energies in eV. Energy is assumed Gaussian distributed. When set to 0. the
electron beam is monoenergetic.

SCAN --- Scanning of Electron Beam
This variable specifies whether the electron beam should be scanned over
the sample or not. The default value depends on TECHQU specified in
&INIT (T for SEM, F for EMP, TEM, and AES).

SPSIZE --- Spot Size of Electron Beam
This variable specifies the spot size (diameter) of the electron beam
at a virtual plane perpendicular to the electron beam. Therefore this spot
does not need to be a circle at the sample's surface. The electron density
in the beam is Gaussian distributed. Units are according to UNITS in
the &INIT namelist.

ZFOCUS --- Plane of Electron Beam Focus
This variable specifies the z-coordinate of the plane of the electron beam
focus. Units are according to UNITS in the &INIT namelist.
The default value for ZFOCUS lies in the middle between the maximum
and the minimum z-coordinate of the target surface (see Chapter 6.1).

Horst Wagner
Tue Mar 19 10:24:55 MET 1996