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&EBEAM

 

This record is used to describe the electron-beam-specific parameters.

DIVERG --- Beam Divergence

This variable specifies the beam divergence in degrees. The initial electron direction will be distributed homogeneously within a cone of aperture 2*DIVERG around the beam direction.

ESTD --- Standard Deviation of Electron Energy

This variable specifies the width of the distribution of initial electron energies in eV. Energy is assumed Gaussian distributed. When set to 0. the electron beam is monoenergetic.

SCAN --- Scanning of Electron Beam

This variable specifies whether the electron beam should be scanned over the sample or not. The default value depends on TECHQU specified in &INIT (T for SEM, F for EMP, TEM, and AES).

SPSIZE --- Spot Size of Electron Beam

This variable specifies the spot size (diameter) of the electron beam at a virtual plane perpendicular to the electron beam. Therefore this spot does not need to be a circle at the sample's surface. The electron density in the beam is Gaussian distributed. Units are according to UNITS in the &INIT namelist.

ZFOCUS --- Plane of Electron Beam Focus

This variable specifies the z-coordinate of the plane of the electron beam focus. Units are according to UNITS in the &INIT namelist. The default value for ZFOCUS lies in the middle between the maximum and the minimum z-coordinate of the target surface (see Chapter 6.1).



Horst Wagner
Tue Mar 19 10:24:55 MET 1996